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Thermodynamics of Gas-Phase Parasitic Reactions in AlGaN MOVPE Growth

✍ Scribed by J. Leitner; J. Stejskal; Z. Sofer

Publisher: John Wiley and Sons
Year: 2003
Tongue: English
Weight: 81 KB
Volume: 0
Category: Article
ISSN: 1862-6351
DOI: 10.1002/pssc.200390007

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