✦ LIBER ✦
Thermodynamic model of helium and hydrogen co-implanted silicon surface layer splitting
✍ Scribed by B.S. Li; C.H. Zhang; H.H. Zhang; Y. Zhang; Y.T. Yang; L.H. Zhou; L.Q. Zhang
- Book ID
- 108224690
- Publisher
- Elsevier Science
- Year
- 2010
- Tongue
- English
- Weight
- 515 KB
- Volume
- 268
- Category
- Article
- ISSN
- 0168-583X
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