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Thermodynamic approach to the synthesis of silicon carbide using tetramethylsilane as the precursor at high temperature

✍ Scribed by Seong-Min Jeong; Kyung-Hun Kim; Young Joon Yoon; Myung-Hyun Lee; Won-Seon Seo


Book ID
116630389
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
397 KB
Volume
357
Category
Article
ISSN
0022-0248

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