Thermodynamic and Experimental Study of High-Purity Aluminum Nitride Formation from Aluminum Chloride by Chemical Vapor Deposition

✍ Scribed by Klaus G. Nickel; Ralf Riedel; Günter Petzow

• Book ID: 110824115
• Publisher: John Wiley and Sons
• Year: 1989
• Tongue: English
• Weight: 537 KB
• Volume: 72
• Category: Article
• ISSN: 0002-7820
• DOI: 10.1111/j.1151-2916.1989.tb05982.x