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Thermodynamic and experimental study of Cu-LPCVD by reduction of copper chloride

✍ Scribed by N. Bourhila; N. Thomas; J. Palleau; J. Torres; C. Bernard; R. Madar

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
805 KB
Volume
91
Category
Article
ISSN
0169-4332

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