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Thermodynamic analysis of liquid source chemical vapor deposition process for the preparation of a Ba-Sr-Ti oxide film

✍ Scribed by Yong Seok Cho; Sung-Il Cho; Jung-Shik Heo; Sang Heup Moon


Book ID
110641938
Publisher
Springer US
Year
2004
Tongue
English
Weight
368 KB
Volume
21
Category
Article
ISSN
0256-1115

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