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Thermodynamic analysis and experimental verification for synthesizing silicon nitride nanoparticles using RF plasma CVD

✍ Scribed by Ruoyu Hong; Jianmin Ding; Hongzhong Li


Book ID
104448652
Publisher
Elsevier
Year
2003
Tongue
English
Weight
401 KB
Volume
1
Category
Article
ISSN
1672-2515

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