Thermochemical effects in hexafluoroethane (Freon 116) modified argon inductively coupled plasmas

✍ Scribed by Les Ebdon; Phillip Goodall

• Book ID: 113374826
• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 723 KB
• Volume: 47
• Category: Article
• ISSN: 0584-8547
• DOI: 10.1016/0584-8547(92)80116-x