✦ LIBER ✦
Thermo-mechanical load capacity and deformation onset of silicon wafers during the high-temperature process
✍ Scribed by Dr. A. Fischer
- Publisher
- John Wiley and Sons
- Year
- 1980
- Tongue
- English
- Weight
- 389 KB
- Volume
- 15
- Category
- Article
- ISSN
- 0232-1300
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