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Thermally stable Nb and Nb/Au ohmic contacts to p-GaN

✍ Scribed by Han-Ki Kim; Tae-Yeon Seong; Cheul-Ro Lee

Book ID: 107452604
Publisher: Springer US
Year: 2001
Tongue: English
Weight: 237 KB
Volume: 30
Category: Article
ISSN: 0361-5235
DOI: 10.1007/s11664-001-0027-x

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## Abstract P‐type ohmic contact between Au nanoparticles/ITO and p‐GaN during heat treatment is reported. Optimal conditions are selected to minimize the lowest specific contact resistance to 1.66 × 10^–3^ Ω cm^2^, as determined by the transmission line model (TLM) after heat treatment process at