Thermally stable low resistance ohmic contacts to n‐type gallium arsenide: Magnetron cathodic sputter‐deposited NiInW contacts

✍ Scribed by Hugon, M. C.; Agius, B.; Varniere, F.; Dubon‐Chevallier, C.; Bresse, J. F.; Froment, M.

• Book ID: 111967920
• Publisher: American Institute of Physics
• Year: 1991
• Tongue: English
• Weight: 651 KB
• Volume: 58
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.104782