Thermally Induced Viscous Flow of Borophosphosilicate-Glass Thin Films on Stepped Surfaces, Part 2: Generalized Parameters for ULSI Glass Flow Characterization

✍ Scribed by V. Y. Vasilev

• Book ID: 111543178
• Publisher: Springer
• Year: 2003
• Tongue: English
• Weight: 82 KB
• Volume: 32
• Category: Article
• ISSN: 1063-7397
• DOI: 10.1023/a:1024563113072