Thermally induced formation of SiC nanoparticles from Si/C/Si multilayers deposited by ultra-high-vacuum ion beam sputtering

✍ Scribed by Chung, Chen-Kuei; Wu, Bo-Hsiung

• Book ID: 111890980
• Publisher: Institute of Physics
• Year: 2006
• Tongue: English
• Weight: 763 KB
• Volume: 17
• Category: Article
• ISSN: 0957-4484
• DOI: 10.1088/0957-4484/17/13/008