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Thermally induced capacitive effect of a nanoporous monel

✍ Scribed by Qiao, Yu; Punyamurtula, Venkata K.; Han, Aijie


Book ID
120054403
Publisher
American Institute of Physics
Year
2007
Tongue
English
Weight
444 KB
Volume
91
Category
Article
ISSN
0003-6951

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Through evaporating two-side comb electrodes and coplanar interdigital electrodes, two humidity sensors were fabricated based on silicon nanoporous pillar array (Si-NPA) and the corresponding device sensitivities were studied. The experimental results showed that the sensor with coplanar interdigita