✦ LIBER ✦
Thermal transportation simulation of a susceptor structure with ring groove for the vertical MOCVD reactor
✍ Scribed by Z.M. Li; Y. Hao; J.C. Zhang; L.A. Yang; S.R. Xu; Y.M. Chang; Z.W. Bi; X.W. Zhou; J.Y. Ni
- Book ID
- 108165965
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 463 KB
- Volume
- 311
- Category
- Article
- ISSN
- 0022-0248
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