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Thermal transient analysis of thin film multilayers heated by pulsed laser

✍ Scribed by Nello Angelucci; Nicola Bianco; Oronzio Manca


Publisher
Elsevier Science
Year
1997
Tongue
English
Weight
447 KB
Volume
40
Category
Article
ISSN
0017-9310

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We report that one-dimensional (1D) and two-dimensional (2D) metal thin film gratings can be directly fabricated by interfering Nd-YAG pulsed laser beams (wavelength = 1064 nm, pulse width = 6 ns) incident from the backside of glass substrate. This process utilizes a laser-induced thermo-elastic for