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Thermal stress analysis of 1 MW gyrotron collector

✍ Scribed by C.B. Baxi; R.W. Callis; I.A. Gorelov; J. Lohr


Book ID
108136983
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
474 KB
Volume
82
Category
Article
ISSN
0920-3796

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We report the stress relaxation behavior of arc-evaporated TiC x N 1Οͺx thin films during isothermal annealing between 350 and 900Β°C. Films with x Ο­ 0, 0.15, and 0.45, each having an initial compressive intrinsic stress s int Ο­ Οͺ 5.4GPa, were deposited by varying the substrate bias V s and the gas co