✦ LIBER ✦
Thermal stability of Ti/Mo and Ti/MoN nanostructures for barrier applications in Cu interconnects
✍ Scribed by Majumder, Prodyut; Takoudis, Christos
- Book ID
- 111950000
- Publisher
- Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 751 KB
- Volume
- 19
- Category
- Article
- ISSN
- 0957-4484
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