✦ LIBER ✦
Thermal stability of Pt/Cr and Pt/Cr2O3 thin-film layers on a SiNx/Si substrate for thermal sensor applications
✍ Scribed by Garraud, Alexandra; Combette, Philippe; Giani, Alain
- Book ID
- 121006411
- Publisher
- Elsevier Science
- Year
- 2013
- Tongue
- English
- Weight
- 683 KB
- Volume
- 540
- Category
- Article
- ISSN
- 0040-6090
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