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Thermal stability of iridium coating prepared by MOCVD

โœ Scribed by Wenbin Yang; Litong Zhang; Yunfeng Hua; Laifei Cheng


Book ID
113656396
Publisher
Elsevier Science
Year
2009
Tongue
English
Weight
399 KB
Volume
27
Category
Article
ISSN
0263-4368

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Structural and morphological characteriz
โœ Yunfeng Hua; Litong Zhang; Laifei Cheng; Wenbin Yang ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 251 KB

The deposition of iridium coatings by MOCVD from iridium tris-acetylacetonate without gas reactant is reported. The effects of sublimation temperature of iridium tris-acetylacetonate precursor and types of substrates on iridium coating microstructure and morphology have been investigated at temperat