✦ LIBER ✦
Thermal stability of high-κ oxides on SiO2/Si or SixNy/SiO2/Si for charge-trapping nonvolatile memories
✍ Scribed by A. Lamperti; E. Cianci; O. Salicio; L. Lamagna; S. Spiga; M. Fanciulli
- Book ID
- 112206878
- Publisher
- John Wiley and Sons
- Year
- 2012
- Tongue
- English
- Weight
- 552 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0142-2421
- DOI
- 10.1002/sia.5053
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