✦ LIBER ✦
Thermal stability of a-Si1−xCx: H films grown by PECVD with different gas sources
✍ Scribed by F. Demichelis; F. Giorgis; C.F. Pirri; E. Tresso
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 558 KB
- Volume
- 225
- Category
- Article
- ISSN
- 0921-4526
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