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Thermal stability and the failure mechanism of the Al/W76N24/Au metallization

✍ Scribed by P.J. Pokela; E. Kolawa; R. Ruiz; J.S. Reid; M.-A. Nicolet

Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 743 KB
Volume: 208
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(92)90943-6

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