Thermal spikes observed during the tantalum sputtering by gold cluster ions

✍ Scribed by S. N. Morozov; U. Kh. Rasulev

• Book ID: 110133577
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2003
• Tongue: English
• Weight: 43 KB
• Volume: 29
• Category: Article
• ISSN: 1063-7850
• DOI: 10.1134/1.1544355