Thermal oxidation as a simple method to increase resolution in nanoimprint lithography

✍ Scribed by Andrew P. Bonifas; Richard L. McCreery; Kenneth D. Harris

• Book ID: 113797899
• Publisher: Elsevier Science
• Year: 2011
• Tongue: English
• Weight: 624 KB
• Volume: 88
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2011.08.006