✦ LIBER ✦

Thermal oxidation and encapsulation of silicon–carbon nanolayers

✍ Scribed by Schnabel, Manuel; Löper, Philipp; Gutsch, Sebastian; Wilshaw, Peter R.; Janz, Stefan

Book ID: 118236640
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 906 KB
Volume: 527
Category: Article
ISSN: 0040-6090
DOI: 10.1016/j.tsf.2012.12.005

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