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Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications

✍ Scribed by Beardslee, L.A.; Addous, A.M.; Heinrich, S.; Josse, F.; Dufour, I.; Brand, O.

Book ID: 115546835
Publisher: IEEE
Year: 2010
Tongue: English
Weight: 285 KB
Volume: 19
Category: Article
ISSN: 1057-7157
DOI: 10.1109/jmems.2010.2052093

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