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Thermal effects of residual macrostress and microstrain in plasma-assisted CVD TiN films

✍ Scribed by Xu Kewei; Chen Jin; Gao Rensheng; He Jiawen

Publisher: Elsevier Science
Year: 1993
Tongue: English
Weight: 748 KB
Volume: 58
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(93)90172-k

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