✦ LIBER ✦
Thermal dry-etching of copper using hydrogen peroxide and hexafluoroacetylacetone
✍ Scribed by Ajay Jain; T.T. Kodas; M.J. Hampden-Smith
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 649 KB
- Volume
- 269
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.