✦ LIBER ✦
Thermal design of hot plate for 300-mm wafer heating in post-exposure bake
✍ Scribed by Jinho Lee; Hyun Goo Kwon; Sangwoo Shin; Sangjo Han; Jungik Ha; Hosun Yoo; Hyung Hee Cho
- Book ID
- 113797902
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 999 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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