Thermal decomposition of trimethylamine borane as a precursor to nanocrystalline CVD BCxNyfilms

✍ Scribed by O. P. Korobeinichev; A. G. Shmakov; A. A. Chernov; M. L. Kosinova; V. S. Sulyaeva; F. A. Kuznetsov

• Book ID: 110167131
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2011
• Tongue: English
• Weight: 454 KB
• Volume: 47
• Category: Article
• ISSN: 0020-1685
• DOI: 10.1134/s0020168511100128