Thermal considerations in multi-wafer liquid phase epitaxy (LPE) boat design

✍ Scribed by S.Y. Leung

• Publisher: Elsevier Science
• Year: 1984
• Tongue: English
• Weight: 608 KB
• Volume: 69
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(84)90335-x