Optical substrate thickness measurement
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Nabeel A. Riza; Mumtaz Sheikh; Frank Perez
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Article
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2007
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Elsevier Science
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English
β 594 KB
Proposed and demonstrated is a simple few components non-contact thickness measurement system for optical quality semi-transparent samples such as Silicon (Si) and 6H Silicon Carbide (SiC) optical chips used for designing sensors. The instrument exploits a hybrid fiber-freespace optical design that