Thermal barrier coatings produced by chemical vapor deposition

✍ Scribed by J.R. Vargas Garcia; Takashi Goto

• Publisher: Institute of Physics and National Institute of Materials Science
• Year: 2003
• Tongue: English
• Weight: 331 KB
• Volume: 4
• Category: Article
• ISSN: 1468-6996
• DOI: 10.1016/s1468-6996(03)00048-2

✦ Synopsis

Yttria stabilized zirconia (YSZ) can be employed as thermal barrier coatings (TBCs) on Ni-based super alloys in gas turbines and aircraft engines. The YSZ coatings have been fabricated by atmospheric plasma spraying or electron-beam physical vapor deposition. The increase in operation temperature of gas turbines demands another fabrication process to obtain high quality TBCs. Chemical vapor deposition (CVD) can be an alternative route to prepare TBCs due to excellent conformal coverage and columnar microstructure. This paper reviews the fabrication of YSZ films by conventional thermal CVD and plasma CVD intended for TBCs. A new laser CVD developed by our group with a high deposition rate of 660 mm h 21 was also briefly introduced.