✦ LIBER ✦
Thermal anneal recovery of silicon surface barriers from argon ion implantation damage
✍ Scribed by K. Giewont; S. Ashok; A. Mogro-Campero
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 381 KB
- Volume
- 142
- Category
- Article
- ISSN
- 0040-6090
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