✦ LIBER ✦
Thermal- and Plasma-Enhanced Copper Film Deposition via a Combined Synthesis-Transport CVD Technique
✍ Scribed by Polyakov, Maxim S.; Badalyan, Aram M.; Kaichev, Vasiliy V.; Igumenov, Igor K.
- Book ID
- 121835423
- Publisher
- John Wiley and Sons
- Year
- 2014
- Tongue
- English
- Weight
- 678 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0948-1907
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