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Thermal and photochemical vapour deposition of Fe from Fe(CO)5 on Si(100)

โœ Scribed by R.B. Jackman; J.S. Foord

Publisher
Elsevier Science
Year
1989
Weight
52 KB
Volume
209
Category
Article
ISSN
0167-2584

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A new miniature high-pressure cell has been developed for the spectroscopic study of reactions between organometallic compounds impregnated into polymer films and gases such as N, or H, at any temperature between ambient and 20 K. The use of the cell is illustrated by the photochemical reactions of