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Thermal and ion irradiation stability of direct current sputtered TiN/B–C–N multilayers

✍ Scribed by Fayeulle, S.; Nastasi, M.; Lu, Y. C.; Kung, H.; Tesmer, J. R.

Book ID: 125462726
Publisher: American Institute of Physics
Year: 1997
Tongue: English
Weight: 496 KB
Volume: 70
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.118496

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