✦ LIBER ✦
Theory of thermal Si oxide growth rate taking into account interfacial Si emission effects
✍ Scribed by H. Kageshima; M. Uematsu; K. Shiraishi
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 554 KB
- Volume
- 59
- Category
- Article
- ISSN
- 0167-9317
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