Theory and analysis of electrode size optimization for capacitive microfabricated ultrasonic transducers

✍ Scribed by Bozkurt, A.; Ladabaum, I.; Atalar, A.; Khuri-Yakub, B.T.

• Book ID: 115489192
• Publisher: IEEE
• Year: 1999
• Tongue: English
• Weight: 288 KB
• Volume: 46
• Category: Article
• ISSN: 0885-3010
• DOI: 10.1109/58.808859