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Theoretical study on the influence of residual stress on adhesion-induced instability in MEMS

✍ Scribed by Wang, ShiJi ;Li, Xian ;Chen, ZhengHan

Book ID: 107371757
Publisher: Elsevier
Year: 2009
Tongue: English
Weight: 500 KB
Volume: 54
Category: Article
ISSN: 2095-9273
DOI: 10.1007/s11434-009-0379-9

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