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Theoretical study of the Cl desorption reaction induced by H2 in the chloride atomic layer epitaxy

✍ Scribed by Yuji Mochizuki; Toshikazu Takada; Toshihiro Sakuma; Susumu Handa; Chiaki Sasaoka; Akira Usui

Publisher: Elsevier Science
Year: 1994
Tongue: English
Weight: 824 KB
Volume: 135
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(94)90749-8

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