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Theoretical study of preferential sputtering of isotopic systems at low fluence

✍ Scribed by U. Conrad; H.M. Urbassek


Book ID
113281874
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
722 KB
Volume
61
Category
Article
ISSN
0168-583X

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The polymer sputter rate dependence on ion fluence and ion chemistry (Ar, N 2 , O 2 ) at 1 keV energy was investigated using a quartz crystal microbalance (QCM) which allowed to do real time etch rate measurements and to study kinetics of sputtering. The obtained sputter rates differed drastically f