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Theoretical models of fast crystallization of a-Si thin films

✍ Scribed by Z. Chvoj; V. Cháb; O. Borusík

Book ID
107859641
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
718 KB
Volume
280-281
Category
Article
ISSN
0040-6031

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Microwave-induced low-temperature crysta
Microwave-induced low-temperature crystallization of amorphous Si thin films
✍ Jin Hyung Ahn; Jeong No Lee; Yoon Chang Kim; Byung Tae Ahn 📂 Article 📅 2002 🏛 Elsevier Science 🌐 English ⚖ 158 KB

Microwave heating was utilized for low-temperature crystallization of amorphous Si (a-Si) films. Microwave heating lowered the annealing temperature and reduced the annealing time. By microwave heating the hydrogen in the amorphous films was diffused out long before the nucleation of polycrystalline