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Theoretical Model for Radiation Enhanced Diffusion and Redistribution of Impurities. Comparison with Experiments

✍ Scribed by Loualiche, S. ;Lucas, C. ;Baruch, P. ;Gailliard, J. P. ;Pfister, J. C.

Publisher
John Wiley and Sons
Year
1982
Tongue
English
Weight
814 KB
Volume
69
Category
Article
ISSN
0031-8965

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