Theoretical limits of scanning white-light interferometry signal evaluation algorithms

✍ Scribed by Fleischer, Matthias ;Windecker, Robert ;Tiziani, Hans J.

• Book ID: 115349361
• Publisher: The Optical Society
• Year: 2001
• Tongue: English
• Weight: 95 KB
• Volume: 40
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.40.002815