✦ LIBER ✦
Theoretical calculations of the broadening of dilute Si, Al and Be doped δ layers in GaAs during SIMS depth profiling
✍ Scribed by R Badheka; JA Van den Berg; DG Armour; M Wadsworth
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 410 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0042-207X
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