✦ LIBER ✦
Theoretical approach to chemical vapour deposition in the atomic system Ti-Si-C-CI-H
✍ Scribed by M. Touanen; F. Teyssandier; M. Ducarroir
- Publisher
- Springer
- Year
- 1989
- Tongue
- English
- Weight
- 287 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0261-8028
No coin nor oath required. For personal study only.