✦ LIBER ✦
Theoretical and experimental study of capacitance considering fabrication process and edge effect for MEMS comb actuator
✍ Scribed by Guo Zhanshe; Feng Zhou; Cao Le; Fan Shangchun
- Book ID
- 106186016
- Publisher
- Springer-Verlag
- Year
- 2010
- Tongue
- English
- Weight
- 587 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0946-7076
No coin nor oath required. For personal study only.