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Theoretical analysis and modeling of the obtaining of polycrystalline silicon in a fluidized-bed reactor

✍ Scribed by V. A. Borodulya; L. M. Vinogradov; O. S. Rabinovich; A. V. Akulich


Book ID
106410274
Publisher
Springer US
Year
2005
Tongue
English
Weight
81 KB
Volume
78
Category
Article
ISSN
1573-871X

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